Abstract
The behavior of nanoparticles in dual-frequency capacitively coupled silane discharges is investigated by employing a one-dimensional self-consistent fluid model. The numerical simulation tries to trace the formation, charging, growth, and transport of dust particles during the discharge, under the influences of the high- and low-frequency electric sources, as well as the gas pressure. The effects of the presence of the nanoparticles and larger anions on the plasma properties are also discussed, especially, for the bulk potential, electron temperature, and densities of various particles. The calculation results show that the nanoparticle density and charge distribution are mainly influenced by the voltage and frequency of the high-frequency source, while the voltage of the low-frequency source can also exert an effect on the nanoparticle formation, compared with the frequency. As the discharge lasts, the electric potential and electron density keep decreasing, while the electron temperature gets increasing after a sudden drop.
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