Abstract
Magnetic Shape Memory (MSM) alloys are a new class of “smart” materials. In the martensite state, they exhibit a reversible strain due to a reorientation of twin variants, based on twin boundary motion driven by an external magnetic field occurring in the martensite state. This effect allows for the development of linear microactuators. This work presents the simulation results for the fabrication of a microactuator based on an MSM alloy with an optimized design. A stator element consists of a NiFe45/55 flux guide, two poles, and double-layer Cu coils wound around each pole for generating the magnetic field. The MSM material applied is NiMnGa. The integrated microactuator is subjected to dynamic simulation, using a “checkerboard” pattern to locally switch the magnetic properties when the relative permeability µr is changed. The model is described with the Ansys Parametric Design Language (APDL). Design, modeling, and simulation of the magnetic system including MSM material, are conducted by Finite Element Method (FEM) analysis using the software tool ANSYS™.
Highlights
Magnetic Shape Memory (MSM) alloys are recognized as promising and high performance materials in the field of Micro Electro-mechanical System (MEMS) applications
The recent progress in designing a new class of MSM alloys is based on the martensite-martensite twin boundary motion driven by a magnetic field [1]
With 5 to 10 percent, the Magnetic Field Induced Strain (MFIS) observed in MSM alloys is substantial, which allows to using this effect in linear microactuators
Summary
Magnetic Shape Memory (MSM) alloys are recognized as promising and high performance materials in the field of Micro Electro-mechanical System (MEMS) applications. This paper describes the 2-D and 3-D modeling as well as the simulation results of an improved MSM microactuator using thin-film technology for the stator fabrication and discrete MSM stripes as actuating element. The goal of these simulations is to maximize the fraction of the. Ferromagnetic Shape Memory Alloys II microactuators cross section exposed to the external magnetic field. In this model, the coil system consists of a left and right double-layer coil with two turns each. It allows to locally allocating the material's relative permeability μr
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