Simulation of active vibration control of a moving stage

Abstract

Active vibration control (AVC) has gained considerable interest due to its inherent adaptability and cost-effectiveness, with its ability to suppress vibrations in the controlled system across various applications. Existing studies focus on the AVC of non-moving systems and usually assume that the vibration signal to be controlled is known and can serve as the ideal reference signal in feedforward control systems. However, in many practical applications, the ideal reference signal is not accessible, and a sensor must be used to detect the reference signal. This can degrade the AVC performance, especially for a moving system. This study, therefore, aims to explore the potential application of piezoelectric stack actuators (PSA) to control the vibration of a moving stage driven by a stepper motor. The secondary path was estimated offline, and vibration data were collected at different moving speeds. The effects of the location of the reference sensor were initially investigated. Then, extensive simulations were conducted to evaluate the performance of different adaptive control algorithms regarding vibration reduction, convergence speed, computational complexities, etc. This research underlines the potential of integrating PSA within a moving system to effectively control its vibration.