Abstract
A modified four-quadrant position sensitive detector (PSD) is developed. This structure is less sensitive to atmospheric turbulence that is a major drawback with the traditional four-quadrant detector. The inter-electrode resistance is as high as for the four-quadrant detector, which is an advantage compared to the lateral effect PSD. The linearity for the modified four-quadrant detector is good in the whole active range of sensing. The structures are limited to small sensing areas with well focused beams and are suitable for use in detectors up to 1 mm in size.
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