Simulation of a direct current microplasma discharge in helium at atmospheric pressure

Abstract

A numerical simulation of a dc microplasma discharge in helium at atmospheric pressure was performed based on a one-dimensional fluid model. The microdischarge was found to resemble a macroscopic low pressure dc glow discharge in many respects. The simulation predicted the existence of electric field reversals in the negative glow under operating conditions that favor a high electron diffusion flux emanating from the cathode sheath. The electric field adjusts to satisfy continuity of the total current. Also, the electric field in the anode layer is self adjusted to be positive or negative to satisfy the “global” particle balance in the plasma. Gas heating was found to play an important role in shaping the electric field profiles both in the negative glow and the anode layer. Basic plasma properties such as electron temperature, electron density, gas temperature, and electric field were studied. Simulation results were in good agreement with experimental observations.