Abstract

A comprehensive modeling approach to link machine dynamics, deposition, and substrate kinematics in an electron beam physical vapor deposition (EB-PVD) is presented in this paper. The machine dynamics in EB-PVD process are captured by finite element models, resulting in the prediction of evaporation rate and vapor distribution. The deposition process is modeled using the level set method, which is one of the computational techniques for tracking topographic evolution. The proposed simulation model is implemented in Matlab and is compared with experimental results published by other researchers. Results indicate that the proposed simulation model can be used to predict microstructure features such as zigzag and helical columnar shapes. The pitch of a zigzag microstructure can be predicted within 20% at the 0.3 to 6 μm level for Yttira-stabilized Zirconia (YSZ) coating.

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