Abstract
A subwavelength Fano-photonic ring resonator pressure sensor is designed in this paper using Finite Element Method (FEM) and Finite Difference Time Domain (FDTD). The sensor is consisted of a PMMA photonic ring waveguide which can produce resonance spectrum to realize pressure measurement. But research shows that the resonance depth is attenuating with the increase of spectral wavelength. So a Fabry-Perot (FP) structure is introduced to the sensor to produce Fano-line shapes. The interaction between the strong trapped resonance of the FP resonator and the weak resonance of the ring resonator can improve the resonance depth to ensure measurement accuracy. After structural optimization, this sensor can realize the pressure sensitivity of 6.49286nm/MPa and the low temperature cross-sensitivity of 0.00208nm/°C. This pressure sensor is based on integrated photonics and has broad application prospect in pressure sensor array.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
