Abstract
Innovative display technologies enable a wide range of different system applications. specifically, in metrology, medical, and automotive applications microdisplays were increasingly used. In the last decades OLED microdisplays were in the focus of display development. A new class of OLED microdisplays with an integrated photodiode array is the latest development. The so-called bi-directional OLED microdisplays combine light-emitting devices (AM-OLED microdisplay) and photo sensitive detectors (photodiode matrix) on one single chip based on OLED-on-CMOS-technology. Currently this kind of display is still a prototype. Based on such a novel bidirectional OLED microdisplay, we present for the first time a system simulation and design of a 3D optical surface metrology system. The first step is the full characterization of the microdisplay. Depending on the characterization results the future system parameters are determined. Based on the characterization results and the application parameters the system design parameters are defined. The functionality of the system is simulated, and a theoretical proof of concept is presented. An example for our application on 3D optical surface metrology system is evaluated.
Highlights
Expanding requirements on manufacturing technology increase the demands on noncontact metrology systems
This kind of display is still a prototype. Based on such a novel bidirectional OLED microdisplay, we present for the first time a system simulation and design of a 3D optical surface metrology system
In this paper we present a 3D surface optical metrology system based on phase-shifting fringe projection [1, 12,13,14,15,16,17] with bi-directional OLED microdisplay (BiMiD)
Summary
Expanding requirements on manufacturing technology increase the demands on noncontact metrology systems. Typical optical metrology systems are based on a separated light-emitting unit (e.g., projection unit) and detection unit (e.g., camera unit) [1, 2]. This fact limits the miniaturization of the sensor system. Advances in Materials Science and Engineering sensors, which are presented in Reckziegel et al [8] Another application based on a BiMiD that works in different wavelength ranges for the OLED imaging and photodiode detection is an HMD and a distance sensor, which are mentioned in Richter et al [9, 11]. We will demonstrate that the application of a bi-directional OLED microdisplay enables the realization of a highly integrated compact surface metrology sensor
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