Abstract
A new concept for a micro mechanical bi-stable switch is presented. The bi-stability is achieved by a mechanically pre-stressed toggle-lever. As bi-stability occurs only in a certain range of geometries for the given mechanical device, extensive FEM analysis (ANSYS) has been used to get a proper design of the switch and to optimise the layout for symmetrical switching behaviour, large stroke and low mechanical stress in the mechanical elements. An analytical model of the bi-stable switch has been developed which gives similar results as the FEM calculations. Switching between the bi-stable states is done electro-statically. The bi-stable switch has been realized using silicon-on-insulator (SOI)-technology. First experimental results show that such bi-stable toggle-lever switches can be utilized for direct multimode fibre switching where a stroke of about 100 μm is needed.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
