Abstract
A computer program for the analysis of high resolution Rutherford backscattering spectra (HR-RBS), which can be recorded with an electrostatic energy analyzer (ESA) and a resolution of about 1keV, has been developed. The use of an ESA results in various differences compared to conventional RBS spectra, motivating the development of a new algorithm for simulation for these spectra. We present a Monte Carlo based diffusion-like fit approach for evaluation of the HR-RBS spectra, which is in particular useful for fitting concentration gradients. Examples for the application of the algorithm are shown to demonstrate its functionality.
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