Abstract
Development of microfabrication technology, along with an ever-increasing demand for reliable, low-cost clinical healthcare has led to the realization of various BioMEMS devices. Present study aims at developing a flexible flow sensor on polymer substrate to monitor real-time blood flow and determine plague formation satisfying sensitivity, biocompatibility, and reliability requirements. Transient simulation of temperature and velocity profile of the thermal-anemometer-based sensor wrapped around the catheter has been studied. Initial fabrication of the sensor over polydimethylsiloxane (PDMS) polymer along with thermal coefficient of resistance (TCR) measurement and flow sensing over straight heater has also been performed. The simulation and fabrication works show promising results toward successful development of a flow sensor for effective healthcare delivery.
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