Abstract

For traditional laser processing methods, processing defects such as recast layers, micro cracks, and high concentration of heat-affected zones are inevitably generated, which reduces the quality of the micro-structured surface and service life. This paper proposes an electrolyte assisted laser mic micro fabrication technique that uses a laser beam and a corrosive jet of electrolyte fluid Coaxial on the artifacts. The corrosive electrolyte jet continuously scours, cools and micro-etches the processing area while the laser is working. The effect can reduce the thickness of the recast layer, reduce the number of micro-cracks, and eliminate the high concentration of heat affected zone. In this paper, the mechanism of laser-assisted laser micro fabrication is studied; mathematical model of fluid field and temperature field in laser-assisted drilling of electrolyte jet is established; experiment of electrolyte-assisted laser drilling and analysis of result are carried out. Electrolyte-jet-assisted laser micro fabrication, the basic processing technology, lays the foundation for further research on the electrolyte assisted laser micro fabrication technology .

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