Simulation and experimental studies on the formation of high-power titanium ion beams for the synergy of ion implantation and energy impact on the surface

Abstract

The development of a material modification method based on synergy of high-intensity ion implantation and simultaneous energy impact on the surface is aimed at creating deep ion-doped layers. To implement this method, the high power density of pulsed and repetitively-pulsed beams of metal and gas ions with micro-submillisecond duration are required. The paper presents the results of numerical simulation and experimental studies on the formation of pulsed high-intensity metal ion beams from vacuum arc plasma. The ballistic focusing of heavy ions at injection currents from 0.1 to 1 A has been studied. The influence of the ion current density, accelerating voltage, and conditions for neutralizing the beam space charge on the transport and focusing of a high power density ion beam has been studied. The possibility of ballistic formation of submillisecond titanium ion beams with a pulse power density of a hundred kilowatts per square centimeter has been experimentally shown.