Abstract
The stacked array piezoelectric deformable mirror (DM) used in adaptive optics (AO) systems usually has actuator-corresponding high-frequency temperature-induced distortion (TID) on its mirror surface when the working temperature is different from the design temperature, which is harmful to beam quality. To effectively eliminate the actuator-corresponding high-frequency TID, we introduce a hybrid connection structure deformable mirror (H-DM), which adopts a magnetic connection structure besides the conventional adhesive connection structure. The TID characteristics of the H-DM are analyzed using the finite element method, and the wavefront compensation capability of the novel H-DM is also investigated in simulation. In the experiment, the initial surface shape and the TID characteristics of a lab-manufactured H-DM are measured. The experimental results show that the H-DM has a good initial surface shape, and no actuator-corresponding high-frequency distortion exists in the surface shape of the H-DM when the environment temperature changes. Thus it can be seen the TID could be well corrected by the H-DM itself, and thereby the environmental adaptability of the DM could be improved substantially.
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