Simulation and Experiment Based on FSMLC Method with EUPI Hysteresis Compensation for a Piezo-Driven Micro Position Stage

Abstract

Micro/nano positioning technologies have been attractive for decades in industrial and scientific applications fields. The actuators have inherent hysteresis that can cause system unexpected behave in some extend. In this research, the authors used extented unparallel Prandtl-Ishlinshii (EUPI) models to represent the input-output relationship of a piezo-driven micro position stage. Integral inverse (I-I) compensator is used for compensating the hysteresis characteristics of the micro positioning stage and compared with direct inverse (D-I) compensator and inverse model (I-M) compensator. However, the accuracy and the robustness of the I-I compensator are worse when there is noisy in the system, a novel sliding-mode-like-control with EUPI (SMLC-EUPI) method was proposed and analyzed by different trajectory tracking experiments in Matlab environment. Though the above strategies can alleviate most deviation, the adjustment of the SMLC’s parameters is very complex. So the fuzzy method is used to adjust these parameters and be verified by trajectory tracking experiments. Finally, for validating the proposed control method, the paper did the corresponding experiment in microscope with CMOS and obtained convincing results.