Abstract
A new high efficiency and large volume microwave plasma source has been developed. The microwave plasma source consists of a 1–10kW 2.45GHz magnetron power supply, microwave transmission and monitoring system, microwave power splitter, adjustable short-circiut plunger and two parallel straight waveguide components with slots on its inner sides. Microwave eletronmagnetic energy is coupled from the parallel rectangular waveguides through regularly positioned slots into the plasma rectangular chamber of 460mm in length, 64mm in width and 118mm in height, shaped by a quartz glass cube to enclose the space of work gas. The location and size and direction of slots and the distance between the two parallel metal waveguides were determined by the electromagnetic numerical simulation. The design parameters of the microwave plasma source were optimized to produce high-amplitude and uniform electromagnetic field distribution. The calculated fields distribution fit perfectly to those measured inside the plasma chamaber without plasma. The stable microwave plasma of different gases (He, Ar) at atmospheric pressure is produced at low-power inside the entire quartz glass cube. The operational characteristics of microwave plasma source in different experimental condition is discussed.
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