Abstract
A laterally-driven inertial micro-switch was designed and fabricated using surface micromachining technology. The dynamic response process was simulated by ANSYS software, which revealed the vibration process of movable electrode when the proof mass is shocked by acceleration in sensitive direction. The test results of fabricated inertial micro-switches with and without anti-shock beams indicated that the contact process of micro-switch with anti-shock beams is more reliable than the one without anti-shock beams. The test results indicated that three contact signals had been observed in the contact process of the inertial switch without anti-shock beams, and only one contact signal in the inertial switch with anti-shock beams, which demonstrated that the anti-shock beams can effectively constrain the vibration in non-sensitive direction.
Highlights
The inertial micro-switch has the advantages of smaller size, lower costs and volume production, is widely used in a variety of handheld devices, toys, industrial transportation and automotive safety.[1,2,3,4] Especially the inertial swith is used to monitoring in the internet of things, in some small-scale or long-lifetime system where the power supply is limited, the power draw significantly reduces the monitoring period before the power would be changed or recharged
The dynamic response process was simulated by ANSYS software, which revealed the vibration process of movable electrode when the proof mass is shocked by acceleration in sensitive direction
The test results indicated that three contact signals had been observed in the contact process of the inertial switch without anti-shock beams, and only one contact signal in the inertial switch with anti-shock beams, which demonstrated that the anti-shock beams can effectively constrain the vibration in non-sensitive direction
Summary
The inertial micro-switch has the advantages of smaller size, lower costs and volume production, is widely used in a variety of handheld devices (such as cell phones), toys, industrial transportation and automotive safety.[1,2,3,4] Especially the inertial swith is used to monitoring in the internet of things, in some small-scale or long-lifetime system where the power supply is limited, the power draw significantly reduces the monitoring period before the power would be changed or recharged. The inertial switch draws no power until an acceleration event occurs, which can provide substantial benefits in reducing the cost of equipment maintenance.[5] when the acceleration over threshold is applied to the inertial switch, the date output just a timestamp, magnitude, and duration for each event.[6] The holding time is a critical parameter, and a short holding time is an obstacle for circuit analyzsis in many applications. In current mainstream design models, the suspended spring-mass is designed as a movable electrode, but, the vibration of the suspended spring-mass is complicated by being multi-directional. When the inertial switch is shocked by acceleration in a sensitive direction, the vibration of proof mass is non-singleton, which leads to contact rebounce, and the threshold acceleration deviates from the expected design.
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