Abstract
At present, the development of through-mask micro-electrochemical machining is only limited to static machining, where the size of the tool is usually the same as that of the workpiece. However, in the electrochemical processing, metal with good electrical conductivity is chosen as the tool electrode, and it is usually very expensive. Based on the cost consideration, a moving tool with small size may be preferred. Finite element method is used in this paper to create the electric field model of through-mask micro-electrochemical machining with moving tool. The effects of the parameters, such as applied voltage, mask thickness, on the machining shape are investigated. The results show that the higher the applied voltage, the larger the machining depth and width, and also the better the aspect ratio. When the thickness of the mask is thin, the electric field is unevenly distributed and the lateral corrosion is more serious. There is an island-like phenomenon, which is related to the masking of the mask. When the moving speed is relatively slow, the relative processing time is longer. The current density accumulated on the surface of the workpiece is thus higher and the material removal rate is higher. As the processing time increases, the machining depth becomes deeper, and the forward corrosion rate is slow down.
Highlights
With the scientific and technological progress, the development of various components tends to refine
Traditional processing methods are often limited by material and size, and must be replaced by means of non-traditional processing methods
The development of through-mask micro-electrochemical machining is only limited to static machining, where the size of the tool is usually the same as that of the workpiece
Summary
With the scientific and technological progress, the development of various components tends to refine. During the process of experiments, the influence of mask thickness, voltage, and electrolyte on machining quality has been studied.[5] the thickness of the mask will affect the distribution of current density. A moving, small tool may replace a static, large tool in the consideration of cost for material Based on these advantages, The COMSOL Multiphysics 5.1, which is a finite element code, is adapted to create a through-mask electrochemical machining model with moving tool. Assuming a through-mask micro-electrochemical machining system, where pure copper was used as the tool, 304 stainless steel as the workpiece, and 15% sodium nitrate (NaNO3) solution as the electrolyte. 5mm D0 + 2Hpre 10 mm 150 mm 75 mm 0.5 mm 2 mm 6, 8, 10, 12 V 20, 30, 50, 100 mm 0.32, 0.48, 0.96 mm/s
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