Abstract
The property of temperature-frequency drift has an effect on the pass band ripples, center frequency and insertion loss of FBAR filters, reducing the reliability of its electrical application. A temperature-frequency drift simulation of a typical Mo/AlN/Mo FBAR is achieved by means of finite element analysis software ANSYS, the simulated temperature coefficient of frequency is about-35ppm/°C within the temperature range of-50°C~150°C. By adding a compensated layer with positive temperature coefficient in the FBAR structure, the effects of the compensated layer thickness on temperature-frequency drift, resonant frequency and electromechanical coupling are analyzed. The simulated temperature coefficient of frequency of designed temperature compensated FBAR, which composed of Mo/AlN/SiO2/Mo, is about 0.8ppm/°C, the property of temperature-frequency drift is effectively improved.
Published Version
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
