Abstract
The error separation with three-probe method mathematical model of the rotary parts in the frequency domain is established, and the basic equation of error separation is solved by discrete Fourier transform, the computer simulation is used to analyze and compare the effect and precision of the workpiece body shape error, rotary motion error and straight motion error in frequency domain adapted by three-probe error separation method, the simulation results show the correctness of the three-probe error separation theory and of the mathematical model, and draw the conclusion: Frequency domain three-probe error separation method can basically achieve the complete separation of each error, it is suitable for in-situ measurement and can get a high measurement accuracy.
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