Abstract
Finite element models of an eddy current sensor array are built up by electromagnetic-circuit couple method, and the influences of conformable substrate on sensor’s output characteristics are analyzed by those models. It is shown that the model contains the conformable substrate has almost the same output characteristics as the model without it, but the output amplitudes and phases of the former model are higher than the latter. Therefore we can simply the sensor as a single surface to facilitate the analysis, and then revise it to fit to the real sensor.
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