Abstract
To realize the error detection of the high-precision photoelectric encoder, the optical small-angle precision measurement principle of the photoelectric autocollimator and single-sided mirror, and the 360° full circle measurement principle of angle inversion of the compound biaxis turntable are used to establish the precision detection platform of the encoder. The error model of the biaxial structure in the photoelectric coding error detection platform is established by introducing the error sources of the biaxial structure, such as the coaxiality error, angular position error, and installation error. At the same time, the biaxis structure and error models are used to optimize the compound biaxis structure system. By analyzing the natural frequency and vibration characteristics of the structure, the rationality and reliability of the compound biaxis system of the high-precision encoder precision detection platform are verified.
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