Abstract
AbstractRecent developments in SIMS with both Ar cluster ions and swift heavy ions are presented. With these primary beams, the analysis of organic semiconductors and animal cells shows that one of the key factors to realizing the SIMS analysis of organic materials is high‐energy deposition near the surface. Molecular depth profiling and images of organic materials were demonstrated by using SIMS. Copyright © 2010 John Wiley & Sons, Ltd.
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