Abstract
The conditions required for SIMS measurement, namely the detection depth of the SIMS signal and an appropriate measurement cycle, to obtain a reliable shape, size and atom number of nano-sized agglomerates in Si have been investigated. Au agglomerates in Si generated during annealing at 900 °C for 360 h are measured by an appropriate SIMS method and it is found that the Au agglomerate has a spherical shape with a concentration of 5.4 × 1021 Au atoms/cm3. The SIMS results agree well with the calculation of spherical agglomerates. The size of agglomerates larger than 20 nm and the Au atom number in agglomerates larger than several nm can be measured in a usual SIMS experiment.
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