Abstract
The fixed-fixed beam in RF switches fabricated by MEMS techniques of a sacrificial layer is inclined to stick to the substrate due to the significant capillary force during drying process. In this paper, sticking models of the fixed-fixed beam are investigated to analyze the sticking effect. Based on these models, an adhesion criterion h c for the fixed-fixed beam is derived to determine whether the beam sticks to the substrate or not. The deduced formula shows that h c is determined by the material property of the beam and its length L and thickness t. It is also found that the width of the beam has no effect on h c . The theoretical models and adhesion criterion are simulated and verified by Finite Element Analysis. The effects of residual stress are also discussed to meet the uncertainty of real fabrication processes.
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