Abstract
We present an easy-to-implement and low-cost setup for the precise measurement of the period chirp of diffraction gratings offering a resolution of 15 pm and reasonable scan speeds of 2 seconds per measurement point. The principle of the measurement is illustrated on the example of two different pulse compression gratings, one fabricated by laser interference lithography (LIL) and the other by scanning beam interference lithography (SBIL). A period chirp of 0.22 pm/mm2 at a nominal period of 610 nm was measured for the grating fabricated with LIL, whereas no chirp was observed for the grating fabricated by SBIL, which had a nominal period of 586.2 nm.
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