Abstract
The construction of a simple refractory metal oven of high temperature uniformity suitable for operation in ultrahigh vacuum is described. When made of tantalum the upper operating temperature limit is about 2700 K for oven lifetimes of about five hours. The uniformity differences in temperature over the entire oven can be less than 15 K at the maximum temperature. This high uniformity is made possible by allowing Joule heat to develop in the current leads to balance oven suspension heat losses. The attainable vacuum with a 50 liter/sec ion sputter pump is between 10−7 and 10−9 Torr in the incandescent range depending on the temperature.
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