Simple and low cost fabrication process of high density vertical Phase-Change Random Access Memory integrated with Electroless Deposition method

Abstract

Electroless Deposition (ELD) method was developed to fabricate metal nanoplug heater for vertical Phase-Change Random Access Memory (PCRAM) application. We demonstrated a functional vertical PCRAM device with heater diameter size around 9 µm by ELD method without Chemical Mechanical Planarization (CMP) process. It was also demonstrated that even 50 nm and 90 nm metal nanoplug can be easily fabricated by ELD process. Therefore ELD process for metal plug fabrication has great potential for low cost and high density vertical PCRAM application.