Abstract
Calling it an obsolete technology would be far too emphasized, but pneumatically operated cylindrical linear actuators draw the keen attention of engineeers who are involved in the design of micro/nano positioning, where any electirc or magnetic interferences are to be prohibited to secure a micro-machining in production of the latest µ-chips. This paper aims to describe our preliminary step of challenge to realize a precise pneumatic positioning system, which includes a very conventional pneumatic cylinder having tough stick-stips, a servo-valve with undesirable dead-zone and the Simple Adaptive Control Algorithm that accommodates non-linear functions to minimize the influence of stick-slip without risk of system instability. The stick-slip deteriorates both of transient and steady-state response, therefore the effectiveness of our proposal should have been confirmed by experiment in this paper.
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