Abstract
Silver sensitization kinetics of germanium selenide films have been studied as a function of the deposition angle of the films. An enhancement in the silver uptake has been found with increasing deposition angle with respect to the surface normal. Scanning electron microscope observations show deep voids with columnar structure in the higher-angle films. Backscattering measurements indicate silver reactions deep into these films. To account for the observed uptake enhancement, the ∼1000 Å columns of the 75° film must consist of smaller substructures. The kinetics of the silver reaction seems to be limited by the penetration times through the voids for the oblique films (60 and 75°) and by the in and/or out diffusion of the Ag and Ge, respectively, through the surface layer for the normal (0°) and near normal (45°) films. The Ag-Ge exchange process, with four silver atoms replacing one germanium atom, has been quantitatively confirmed by x-ray fluorescence measurements.
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