Silver schottky contacts on Si(111)? H-(1�1) surfaces prepared by wet-chemical etching

Abstract

Schottky contacts were prepared by evaporation of silver on H-terminated Si(111) surfaces at room temperature. The Si(111)∶H-(1×1) surfaces were obtained by wet-chemical etching in buffered hydrofluoric acid. The zero-bias barrier heights and the ideality factors, which were determined fromI/V characteristics measured with these contacts, were found to be linearly correlated. This plot gives a zero-bias barrier height of 0.74 eV for an ideality factor of 1.01 which is obtained for image-force lowering of the barrier only. The barrier heights observed here equal the one found with Ag/Si(111)-(1×1) contacts. They were prepared by Ag evaporation onto clean Si(111)-(7×7) surfaces at room temperature and subsequent heat treatments. The present result is explained by the desorption of the hydrogen adatoms during the deposition of Ag and the existence of a (1×1)-structure at the Ag/Si(111) interface.