Silicon-Germanium-Silica Monolithic Photonic Integration Platform for High-Performance Optical Data Communication Systems

Abstract

For practical data communications applications highly-integrated silicon-based photonic devices, we have developed a silicon-germanium-silica monolithic photonic integration platform, on which high-performance silica-based passive devices and compact, high-speed silicon-based dynamic/active devices can be monolithically integrated. In the Si-Ge-silica monolithic integration, it is important to deposit index-controllable silica at a low temperature, so as not to damage the Si- and Ge-based active/dynamic devices. Using this platform, various kind of photonic devices have been integrated on a small silicon ship. On this photonic platform, moreover, high-speed electronic circuits can also be integrated.