Silicon-Based Suspended Structure Fabricated by Femtosecond Laser Direct Writing and Wet Etching

Abstract

Suspended structures have attracted a great deal of attention in the field of micro-technology and nanotechnology for their important functions. However, the fabrication of the suspended structures is typically cumbersome and time-consuming and requires complicated processes, such as multiple deposition, photolithography, and etching. Here, we report a new method of fabricating flexible suspended structures by femtosecond laser direct writing followed by wet chemical alkaline (KOH) etching. Our proposed method will enable convenient and flexible fabrication of suspended structures for a wide variety of applications in the field of micro-technology and nanotechnology.