Abstract

Silicon-based light emitters have been fabricated on silicon-on-insulator substrates by embedding Ge self-assembled quantum dots in microdisk resonators. Strong room-temperature resonant luminescence is observed from the microdisks under optical pumping. Photoluminescence from Ge quantum dots is significantly enhanced by the microdisk resonators. Different kinds of cavity modes, whispering-gallery modes, and Fabry-Pérot modes are observed in the wavelength range from 1.2to1.6μm for microdisks with different diameters.

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