Abstract

We demonstrate a radiation hydrodynamic simulation of optical vortex pulse-ablated microcone structures on silicon (Si) substrates. Doughnut-shaped craters were formed by single pulse irradiation on the Si substrate, and a twisted cone structure with a height of 3.5 µm was created at the center of the irradiation spot by the circularly polarized optical vortex pulse. A two-dimensional (2-D) radiation hydrodynamic simulation reproduced the cone structure well with a height of 3 µm. The central part of the incident laser power was lowered from the initial profile due to plasma shielding over the laser pulse duration for an inverted double-well laser profile. The acute tip shape of the silicon surface can survive over the laser irradiation period.

Highlights

  • We have described the ablated structures on Si substrates irradiated by polarization-determined optical vortex laser pulses and using the radiation hydrodynamic simulation

  • Optical vortex beams are expected to be employed as a well-controlled fabrication technique of microparticles

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Summary

Methods

We determined the polarization states of the converted optical vortex nanosecond pulse. A laser is employed as a light source. After passing through a polarizer and two lenses, the laser beam with horizontal linear polarization is incident on the vortex beam generator. The vortex beam generator consists of a linear polarizer and a vortex phase plate (RPC Photonics, VPP-m1064), which is fabricated by gray scale lithography. A Gaussian beam with a uniform phase is converted into a Laguerre-Gaussian beam, like a doughnut-shaped beam.

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