Abstract
The use of integrated circuit technology to build mechanical structures by the use of silicon micromachining has gained wide acceptance for some sensor types over the past 10 years. The principal application for silicon micromachining has been for pressure transducers used in the automotive and medical markets. The use of silicon micromachining technology in acoustical sensors has been somewhat limited, although some microphones and accelerometers have been built using this technology. This paper will review the micromachining technologies with specific application to the acoustics and acceleration sensors. Examples will be given for microphones, accelerometers, and pressure transducers with the material process technology used for their manufacture. Projections are made of future trends in silicon micromachining technology for acoustic transducers. The electronic interface to these acoustic and acceleration transducers are explored.
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