Abstract
Ordinary backscattering with 4He + ions is a powerful tool for material analysis in thin films. It is well known that both the mass — and depth resolution is improved when heavier projectile ions are used. However, the detector resolution deteriorates as the energy and the mass number of the ions increases. In this work, the detector resolution for the ions 4He, 7Li, 11B, 12C and 16O has been measured. Depth resolution diagrams, using a gold target, were made for the different ions. A comparison of 12C and 16O ions for analysis of GaAs substrates was also performed. The results indicate that sufficient mass resolution was obtained with 12C ions and could therefore be preferred because of the higher counting rate for the lighter ions and subsequent shorter analysing time.
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