Abstract
Silicon subwavelength grating waveguides enable flexible design in integrated photonics through nano-scale refractive index engineering. Here, we explore the possibility of combining silicon subwavelength gratings waveguides with a high-index chalcogenide glass as a top cladding, thus modifying the waveguiding behavior and opening a new design axis for these structures. A detailed investigation of the heterogeneous SWG waveguide with high-index cladding is presented based on analytical and numerical simulations. We design, fabricate and characterize silicon subwavelength grating waveguide microring resonators with an As20S80 cladding. Thanks to As20S80 negative thermo-optic coefficient, we achieve near athermal behavior with a measured minimum thermally induced resonance shift of -1.54 pm/K, highlighting the potential of subwavelength grating waveguides for modal confinement engineering and to control light-matter interaction. We also show that the chalcogenide glass can be thermally reflowed to remove air gaps inside the cladding, resulting in a highly conformal structure. These types of waveguides can find application in reconfigurable photonics, nonlinear optics, metamaterials or slow light.
Highlights
Advances in fabrication technology have put forward the potential of controlling light at the subwavelength scale in order to boost the performance and flexibility of integrated optic components
Silicon subwavelength grating waveguides (SWGs) are a prominent example of subwavelength engineering that led to substantial performance improvements in practical applications [1]
We study the combination of silicon SWGs with a high-index chalcogenide glass top cladding
Summary
Advances in fabrication technology have put forward the potential of controlling light at the subwavelength scale in order to boost the performance and flexibility of integrated optic components. To this end, silicon subwavelength grating waveguides (SWGs) are a prominent example of subwavelength engineering that led to substantial performance improvements in practical applications [1]. In addition to index engineering, SWGs are interesting to control light-matter interaction with the waveguide top cladding, which can be air or an analyte for sensing [13,14], a material. We demonstrate that the use of a chalcogenide soft glass can eliminate the formation of air gaps inside the cladding
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