Abstract
AbstractThis paper describes the overall operation of a 15 cm dia. fluidized‐bed reactor for silicon production via silane pyrolysis. The fluidized‐bed reactor has been characterized by its performance data and parametric effects. A withdrawal system is used to selectively remove big particles. Seed generation is provided by a fluid jet milling device, which avoids metallic grinding contamination. The silicon particle size growth calculated from a scavenging/deposition model agrees with actual size measurements.
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