Silicon on-chip 1D photonic crystal nanobeam bandstop filters for the parallel multiplexing of ultra-compact integrated sensor array.

Abstract

We propose a novel multiplexed ultra-compact high-sensitivity one-dimensional (1D) photonic crystal (PC) nanobeam cavity sensor array on a monolithic silicon chip, referred to as Parallel Integrated 1D PC Nanobeam Cavity Sensor Array (PI-1DPC-NCSA). The performance of the device is investigated numerically with three-dimensional finite-difference time-domain (3D-FDTD) technique. The PI-1DPC-NCSA consists of multiple parallel-connected channels of integrated 1D PC nanobeam cavities/waveguides with gap separations. On each channel, by connecting two additional 1D PC nanobeam bandstop filters (1DPC-NBFs) to a 1D PC nanobeam cavity sensor (1DPC-NCS) in series, a transmission spectrum with a single targeted resonance is achieved for the purpose of multiplexed sensing applications. While the other spurious resonances are filtered out by the stop-band of 1DPC-NBF, multiple 1DPC-NCSs at different resonances can be connected in parallel without spectrum overlap. Furthermore, in order for all 1DPC-NCSs to be integrated into microarrays and to be interrogated simultaneously with a single input/output port, all channels are then connected in parallel by using a 1 × n taper-type equal power splitter and a n × 1 S-type power combiner in the input port and output port, respectively (n is the channel number). The concept model of PI-1DPC-NCSA is displayed with a 3-parallel-channel 1DPC-NCSs array containing series-connected 1DPC-NBFs. The bulk refractive index sensitivities as high as 112.6nm/RIU, 121.7nm/RIU, and 148.5nm/RIU are obtained (RIU = Refractive Index Unit). In particular, the footprint of the 3-parallel-channel PI-1DPC-NCSA is 4.5μm × 50μm (width × length), decreased by more than three orders of magnitude compared to 2D PC integrated sensor arrays. Thus, this is a promising platform for realizing ultra-compact lab-on-a-chip applications with high integration density and high parallel-multiplexing capabilities.