Abstract
We propose design of a chip-scale evanescent field absorption-based trace gas sensor, exploiting silicon-on-nitride (SON) slot waveguide structure at mid-IR wavelength region. As an example, we numerically demonstrate detectability of NH3 gas in the atmosphere at its characteristic absorption wavelength of 3μm. Using the optimum sensor design, detection down to 5ppm including loss is viable in just ∼8.7mm length of the proposed slot waveguide. The achievable evanescent field fraction (η) is upto ∼43%. Our tolerance studies show that η is relatively more critical to the slot width as compared to its height.
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