Abstract
During the 1980's and 1990's the methods used to manufacture inertial MEMS devices could be divided into two groups; bulk and surface micromachining. Institutions which developed high precision inertial MEMS devices usually employed bulk micromachining processes. This was done to fabricate devices with large proof masses and stiff beams which result in a high scale factor, as well as high drive, and sense frequencies. New processes have been developed which are based on silicon on insulator (SOI) wafers. These processes combine the advantages of bulk and surface micromachining while enabling the etching of thick proof masses. This paper illustrates the manufacturing and performance advantages of an SOI inertial MEMS process.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
