Silicon nanowires grown in nanoporous alumina matrices on [formula omitted] oriented silicon substrates investigated by electron microscopy

Abstract

We present the growth of single-crystal silicon nanowires using a Vapor Liquid Solid (VLS) method (with gold colloids as catalysts) in nanoporous anodic alumina on 〈 100 〉 oriented silicon substrate. Results from scanning and transmission electron microscopy are presented and discussed. The nanowires (diameter of 20–50 nm) are forced to grow self-organized perpendicularly to the silicon substrates over large areas, even on 〈 100 〉 oriented substrates, and are surrounded by an insulating alumina coating. The usual 〈 111 〉 growth direction can thus be changed over to the direction of the pore.