Silicon microstructures for high throughput mixing devices

Abstract

Convective mixing in microstructures gives good mixing results in a very short time. In this work, a theoretical and experimental study is performed on convective micro mixing in different mixing structures and their combinations. Various mixing elements had been integrated on a silicon chip to achieve a device for a high mass-flow rate above 15 kg/h. These test structures are fabricated and tested concerning their flow behaviour and mixing characteristics. Flow measurements with pH neutralization and indication by bromothymol blue confirm the numerical simulations of the flow characteristics and mixing behaviour. The integral mixing quality in the micromixer is measured with the iodide–iodate-reaction (Villermaux–Dushman) and shows excellent values for high Re numbers. This opens the potential of microstructures for new applications in the production of chemicals.