Year-end Sale % OFF 
Abstract
Advanced principles of integrated circuit fabrication can be applied for three-dimensional microstructures. This technology based on photofabrication is called micromachining. The micromachining makes it possible to fabricate micromachines which have sensors, actuators and electronic circuits on a silicon wafer. Microflow control systems and integrated mechanical sensors were fabricated. Micromachining and micromachines of silicon are reviewed.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
