Silicon microgyroscope temperature prediction and control system based on BP neural network and Fuzzy-PID control method

Abstract

We present a novel silicon microgyroscope (SMG) temperature prediction and control system in a narrow space. As the temperature of SMG is closely related to its drive mode frequency and driving voltage, a temperature prediction model can be established based on the BP neural network. The simulation results demonstrate that the established temperature prediction model can estimate the temperature in the range of −40 to 60 °C with an error of less than ±0.05 °C. Then, a temperature control system based on the combination of fuzzy logic controller and the increment PID control method is proposed. The simulation results prove that the Fuzzy-PID controller has a smaller steady state error, less rise time and better robustness than the PID controller. This is validated by experimental results that show the Fuzzy-PID control method can achieve high precision in keeping the SMG temperature stable at 55 °C with an error of less than 0.2 °C. The scale factor can be stabilized at 8.7 mV/°/s with a temperature coefficient of 33 ppm °C−1. ZRO (zero rate output) instability is decreased from 1.10°/s (9.5 mV) to 0.08°/s (0.7 mV) when the temperature control system is implemented over an ambient temperature range of −40 to 60 °C.