Abstract
This paper reports on the experimental characteri-zation of a vacuum packaged MEMS gyroscope with a novel quatrefoil suspension system fabricated on a (100) single-crystal silicon substrate. The gyroscopic operation is demonstrated by driving one of the secondary degenerate elliptical modes while sensing the response of the other elliptical mode: both modes demonstrate a quality factor exceeding 1 million at an operating frequency of 426 kHz. The key device performance parameters are improved by implementing mode matching using electrostatic frequency tuning to decrease the initial frequency split between two near-degenerate modes from 4 Hz to 0.01 Hz. The me-chanical sensitivity is improved by a factor of 25.4 for mode-matched operations in comparison to the untuned case. Additionally, the angle random walk (ARW) and bias instability (BI) improved to 0.01 °/√h and 0.34 °/h, i.e., by a factor of 7.7 and 8.24 respectively. The measured parameters are consistent with specifications for a high-end tactical grade MEMS gyroscope.
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