Abstract
Miniaturized and low-cost optical gyroscopes are urgently required for emerging applications in consumer electronics market. In this paper, we proposed a theoretical analysis and preliminary experiment results for integrated interferometric optical gyroscope based on the silicon-on-insulator (SOI) platform for the first time. The gyroscope is based on the Sagnac effect and composed of coiled multimode waveguides to reduce propagation loss and the footprint. The sensitivity of the sensing part is fully investigated in terms of waveguide loss, gyroscope footprint, crossing numbers for coiled waveguides, as well as the waveguide cross section. The experimental results show that gyroscope sensitivity is 51.3 deg/s with a footprint of 600 μm × 700 μm.
Highlights
Gyroscope is a kind of angular velocity sensor, which is widely used on airplanes, ships, cars and even mobile phones nowadays
The gyroscopes based on silicon nitride and silica planar waveguide platform are less compact than silicon for large-scale integration
The low loss waveguide ring resonant optical gyroscopes (ROGs), with a ridged multimode structure, based on SOI were proposed with an experimental sensitivity of 27 deg/s17
Summary
Miniaturized and low-cost optical gyroscopes are urgently required for emerging applications in consumer electronics market. We proposed a theoretical analysis and preliminary experiment results for integrated interferometric optical gyroscope based on the silicon-on-insulator (SOI) platform for the first time. The gyroscope is based on the Sagnac effect and composed of coiled multimode waveguides to reduce propagation loss and the footprint. Compared with RLGs, IFOGs and MEMS gyroscopes, chip-scale integrated optical gyroscopes have attracted increasing research attentions and could have great applications in low-cost consumer electronics market[9]. The low loss waveguide ring resonant optical gyroscopes (ROGs), with a ridged multimode structure, based on SOI were proposed with an experimental sensitivity of 27 deg/s17. The waveguide cross section and the structure geometry are optimized Both theoretical analysis and experimental results for optical sensing part of an integrated IOG based on SOI platform are demonstrated. A theoretical shot noise limited sensitivity of 51.3 deg/s is achieved with the sensing part in an area of 600 μm × 700 μm, and the sensitivity can be further optimized to 8.3 deg/s with an area of 2300 μm × 2200 μm, considering the given loss level
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