Silicon enhanced carbon nanotube growth on nickel films by chemical vapor deposition

Abstract

Silicon enhances carbon nanotube growth on nickel films by chemical vapor deposition using methane and hydrogen. Nanotube growth characteristic is significantly improved on nickel films patterned by argon plasma etching on silicon oxide layers. Auger electron spectroscopy shows that a reduced silicon phase forms in the surface silicon oxide layer by Ar ion bombardment used for patterning. The enhanced growth of carbon nanotubes could be ascribed to an oxygen removal effect by silicon in the process of synthesis.