Abstract

The MM2 molecular mechanics method is used for calculations on the adsorption complex formed on the surface of silicon dioxide due to adsorption of gases such as H2O, O2, NH3, HF. The results of modeling are in good agreement with experimental data; these results explain why film thickness decreases after adsorption and support our hypothesis about reconstruction of the surface layer stimulated by the adsorbed molecule.

Full Text
Published version (Free)

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call